2/14/2010	12:18:24 PM	Bypass valve closed
2/14/2010	12:18:24 PM	Main Vac valve closed
2/14/2010	12:19:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2010	12:19:29 PM	H2 valve closed
2/14/2010	12:19:29 PM	BCl3 valve closed
2/14/2010	12:19:29 PM	PH3 valve closed
2/14/2010	12:19:29 PM	SiCl4 pre valve closed
2/14/2010	12:19:29 PM	SiCl4 post valve closed
2/14/2010	12:19:29 PM	Main Vac valve closed
2/14/2010	12:19:29 PM	Bypass valve closed
2/14/2010	12:19:29 PM	Bubbler valve closed
2/14/2010	12:19:29 PM	Helium valve opened
2/14/2010	12:19:29 PM	Helium MFC set to  500.000000
2/14/2010	12:19:29 PM	H2 MFC set to  0.000000
2/14/2010	12:19:29 PM	BCl3 MFC set to  0.000000
2/14/2010	12:19:29 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:19:29 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:19:29 PM	Tube furnace set to 0
2/14/2010	12:19:29 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:20:50 PM	Helium valve closed
2/14/2010	12:20:50 PM	H2 valve closed
2/14/2010	12:20:50 PM	BCl3 valve closed
2/14/2010	12:20:50 PM	PH3 valve closed
2/14/2010	12:20:50 PM	SiCl4 pre valve closed
2/14/2010	12:20:50 PM	SiCl4 post valve closed
2/14/2010	12:20:50 PM	Main Vac valve closed
2/14/2010	12:20:50 PM	Bypass valve closed
2/14/2010	12:20:50 PM	Bubbler valve closed
2/14/2010	12:20:50 PM	Helium MFC set to  0.000000
2/14/2010	12:20:50 PM	H2 MFC set to  0.000000
2/14/2010	12:20:50 PM	BCl3 MFC set to  0.000000
2/14/2010	12:20:50 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:20:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:20:50 PM	Tube furnace set to 0
2/14/2010	12:20:50 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:20:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2010	12:21:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2010	12:21:31 PM	Helium valve closed
2/14/2010	12:21:31 PM	H2 valve closed
2/14/2010	12:21:31 PM	BCl3 valve closed
2/14/2010	12:21:31 PM	PH3 valve closed
2/14/2010	12:21:31 PM	SiCl4 pre valve closed
2/14/2010	12:21:31 PM	SiCl4 post valve closed
2/14/2010	12:21:31 PM	Main Vac valve closed
2/14/2010	12:21:31 PM	Bubbler valve closed
2/14/2010	12:21:31 PM	Bypass valve opened
2/14/2010	12:21:31 PM	Helium MFC set to  0.000000
2/14/2010	12:21:31 PM	H2 MFC set to  0.000000
2/14/2010	12:21:31 PM	BCl3 MFC set to  0.000000
2/14/2010	12:21:31 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:21:31 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:21:31 PM	Tube furnace set to 0
2/14/2010	12:21:31 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:21:52 PM	Helium valve closed
2/14/2010	12:21:52 PM	H2 valve closed
2/14/2010	12:21:52 PM	BCl3 valve closed
2/14/2010	12:21:52 PM	PH3 valve closed
2/14/2010	12:21:52 PM	SiCl4 pre valve closed
2/14/2010	12:21:52 PM	SiCl4 post valve closed
2/14/2010	12:21:52 PM	Bubbler valve closed
2/14/2010	12:21:52 PM	Main Vac valve opened
2/14/2010	12:21:52 PM	Bypass valve opened
2/14/2010	12:21:52 PM	Helium MFC set to  0.000000
2/14/2010	12:21:52 PM	H2 MFC set to  0.000000
2/14/2010	12:21:52 PM	BCl3 MFC set to  0.000000
2/14/2010	12:21:52 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:21:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:21:52 PM	Tube furnace set to 0
2/14/2010	12:21:52 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:21:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2010	12:23:07 PM	Bypass valve closed
2/14/2010	12:23:07 PM	Main Vac valve closed
2/14/2010	12:26:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2010	12:26:19 PM	Helium valve closed
2/14/2010	12:26:19 PM	H2 valve closed
2/14/2010	12:26:19 PM	BCl3 valve closed
2/14/2010	12:26:19 PM	PH3 valve closed
2/14/2010	12:26:19 PM	SiCl4 pre valve closed
2/14/2010	12:26:19 PM	SiCl4 post valve closed
2/14/2010	12:26:19 PM	Main Vac valve closed
2/14/2010	12:26:19 PM	Bubbler valve closed
2/14/2010	12:26:19 PM	Bypass valve opened
2/14/2010	12:26:19 PM	Helium MFC set to  0.000000
2/14/2010	12:26:19 PM	H2 MFC set to  0.000000
2/14/2010	12:26:19 PM	BCl3 MFC set to  0.000000
2/14/2010	12:26:19 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:26:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:26:19 PM	Tube furnace set to 0
2/14/2010	12:26:19 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:26:51 PM	Helium valve closed
2/14/2010	12:26:51 PM	H2 valve closed
2/14/2010	12:26:51 PM	BCl3 valve closed
2/14/2010	12:26:51 PM	PH3 valve closed
2/14/2010	12:26:51 PM	SiCl4 pre valve closed
2/14/2010	12:26:51 PM	SiCl4 post valve closed
2/14/2010	12:26:51 PM	Bubbler valve closed
2/14/2010	12:26:51 PM	Main Vac valve opened
2/14/2010	12:26:51 PM	Bypass valve opened
2/14/2010	12:26:51 PM	Helium MFC set to  0.000000
2/14/2010	12:26:51 PM	H2 MFC set to  0.000000
2/14/2010	12:26:51 PM	BCl3 MFC set to  0.000000
2/14/2010	12:26:51 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:26:51 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:26:51 PM	Tube furnace set to 0
2/14/2010	12:26:51 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:26:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2010	12:27:52 PM	Bypass valve closed
2/14/2010	12:27:52 PM	Main Vac valve closed
2/14/2010	12:27:58 PM	Bypass valve opened
2/14/2010	12:27:59 PM	Main Vac valve opened
2/14/2010	12:32:08 PM	H2 valve opened
2/14/2010	12:32:09 PM	H2 valve closed
2/14/2010	12:32:10 PM	H2 valve opened
2/14/2010	12:32:12 PM	H2 valve closed
2/14/2010	12:32:52 PM	BCl3 valve opened
2/14/2010	12:32:52 PM	BCl3 valve closed
2/14/2010	12:34:05 PM	SiCl4 post valve opened
2/14/2010	12:34:06 PM	SiCl4 post valve closed
2/14/2010	12:38:04 PM	Bypass valve closed
2/14/2010	12:38:04 PM	Main Vac valve closed
2/14/2010	12:38:29 PM	Bypass valve opened
2/14/2010	12:38:30 PM	Main Vac valve opened
2/14/2010	12:38:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2010	12:38:37 PM	H2 valve closed
2/14/2010	12:38:37 PM	BCl3 valve closed
2/14/2010	12:38:37 PM	PH3 valve closed
2/14/2010	12:38:37 PM	SiCl4 pre valve closed
2/14/2010	12:38:37 PM	SiCl4 post valve closed
2/14/2010	12:38:37 PM	Main Vac valve closed
2/14/2010	12:38:37 PM	Bypass valve closed
2/14/2010	12:38:37 PM	Bubbler valve closed
2/14/2010	12:38:37 PM	Helium valve opened
2/14/2010	12:38:37 PM	Helium MFC set to  500.000000
2/14/2010	12:38:37 PM	H2 MFC set to  0.000000
2/14/2010	12:38:37 PM	BCl3 MFC set to  0.000000
2/14/2010	12:38:37 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:38:37 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:38:37 PM	Tube furnace set to 0
2/14/2010	12:38:37 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:39:58 PM	Helium valve closed
2/14/2010	12:39:58 PM	H2 valve closed
2/14/2010	12:39:58 PM	BCl3 valve closed
2/14/2010	12:39:58 PM	PH3 valve closed
2/14/2010	12:39:58 PM	SiCl4 pre valve closed
2/14/2010	12:39:58 PM	SiCl4 post valve closed
2/14/2010	12:39:58 PM	Main Vac valve closed
2/14/2010	12:39:58 PM	Bypass valve closed
2/14/2010	12:39:58 PM	Bubbler valve closed
2/14/2010	12:39:58 PM	Helium MFC set to  0.000000
2/14/2010	12:39:58 PM	H2 MFC set to  0.000000
2/14/2010	12:39:58 PM	BCl3 MFC set to  0.000000
2/14/2010	12:39:58 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:39:58 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:39:58 PM	Tube furnace set to 0
2/14/2010	12:39:58 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:39:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/14/2010	12:40:08 PM	SiCl4 post valve opened
2/14/2010	12:40:08 PM	SiCl4 post valve closed
2/14/2010	12:40:10 PM	SiCl4 post valve opened
2/14/2010	12:40:11 PM	SiCl4 post valve closed
2/14/2010	12:40:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2010	12:40:21 PM	Helium valve closed
2/14/2010	12:40:21 PM	H2 valve closed
2/14/2010	12:40:21 PM	BCl3 valve closed
2/14/2010	12:40:21 PM	PH3 valve closed
2/14/2010	12:40:21 PM	SiCl4 pre valve closed
2/14/2010	12:40:21 PM	SiCl4 post valve closed
2/14/2010	12:40:21 PM	Main Vac valve closed
2/14/2010	12:40:21 PM	Bubbler valve closed
2/14/2010	12:40:21 PM	Bypass valve opened
2/14/2010	12:40:21 PM	Helium MFC set to  0.000000
2/14/2010	12:40:21 PM	H2 MFC set to  0.000000
2/14/2010	12:40:21 PM	BCl3 MFC set to  0.000000
2/14/2010	12:40:21 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:40:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:40:21 PM	Tube furnace set to 0
2/14/2010	12:40:21 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:40:41 PM	Helium valve closed
2/14/2010	12:40:41 PM	H2 valve closed
2/14/2010	12:40:41 PM	BCl3 valve closed
2/14/2010	12:40:41 PM	PH3 valve closed
2/14/2010	12:40:41 PM	SiCl4 pre valve closed
2/14/2010	12:40:41 PM	SiCl4 post valve closed
2/14/2010	12:40:41 PM	Bubbler valve closed
2/14/2010	12:40:41 PM	Main Vac valve opened
2/14/2010	12:40:41 PM	Bypass valve opened
2/14/2010	12:40:41 PM	Helium MFC set to  0.000000
2/14/2010	12:40:41 PM	H2 MFC set to  0.000000
2/14/2010	12:40:41 PM	BCl3 MFC set to  0.000000
2/14/2010	12:40:41 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:40:41 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:40:41 PM	Tube furnace set to 0
2/14/2010	12:40:41 PM	Bypass solenoid MFC set to  0.000000
2/14/2010	12:40:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/14/2010	12:41:54 PM	Bypass valve closed
2/14/2010	12:41:54 PM	Main Vac valve closed
2/14/2010	12:42:07 PM	Bypass valve opened
2/14/2010	12:42:08 PM	Main Vac valve opened
2/14/2010	12:46:26 PM	Program started after a nonstandard shutdown
2/14/2010	12:46:26 PM	Helium valve closed
2/14/2010	12:46:26 PM	H2 valve closed
2/14/2010	12:46:26 PM	BCl3 valve closed
2/14/2010	12:46:26 PM	PH3 valve closed
2/14/2010	12:46:26 PM	SiCl4 pre valve closed
2/14/2010	12:46:26 PM	SiCl4 post valve closed
2/14/2010	12:46:26 PM	Main Vac valve closed
2/14/2010	12:46:26 PM	Bypass valve closed
2/14/2010	12:46:26 PM	Bubbler valve closed
2/14/2010	12:46:26 PM	Helium MFC set to  0.000000
2/14/2010	12:46:26 PM	H2 MFC set to  0.000000
2/14/2010	12:46:26 PM	BCl3 MFC set to  0.000000
2/14/2010	12:46:26 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:46:26 PM	Bypass solenoid MFC set to  760.000000
2/14/2010	12:46:26 PM	Tube furnace set to 0
2/14/2010	12:46:26 PM	Bypass solenoid MFC set to  760.000000
2/14/2010	12:46:43 PM	Program started after a nonstandard shutdown
2/14/2010	12:46:44 PM	Helium valve closed
2/14/2010	12:46:44 PM	H2 valve closed
2/14/2010	12:46:44 PM	BCl3 valve closed
2/14/2010	12:46:44 PM	PH3 valve closed
2/14/2010	12:46:44 PM	SiCl4 pre valve closed
2/14/2010	12:46:44 PM	SiCl4 post valve closed
2/14/2010	12:46:44 PM	Main Vac valve closed
2/14/2010	12:46:44 PM	Bypass valve closed
2/14/2010	12:46:44 PM	Bubbler valve closed
2/14/2010	12:46:44 PM	Helium MFC set to  0.000000
2/14/2010	12:46:44 PM	H2 MFC set to  0.000000
2/14/2010	12:46:44 PM	BCl3 MFC set to  0.000000
2/14/2010	12:46:44 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:46:44 PM	Bypass solenoid MFC set to  760.000000
2/14/2010	12:46:44 PM	Tube furnace set to 0
2/14/2010	12:46:44 PM	Bypass solenoid MFC set to  760.000000
2/14/2010	12:47:01 PM	Program started after a nonstandard shutdown
2/14/2010	12:47:01 PM	Helium valve closed
2/14/2010	12:47:01 PM	H2 valve closed
2/14/2010	12:47:01 PM	BCl3 valve closed
2/14/2010	12:47:01 PM	PH3 valve closed
2/14/2010	12:47:01 PM	SiCl4 pre valve closed
2/14/2010	12:47:01 PM	SiCl4 post valve closed
2/14/2010	12:47:01 PM	Main Vac valve closed
2/14/2010	12:47:01 PM	Bypass valve closed
2/14/2010	12:47:01 PM	Bubbler valve closed
2/14/2010	12:47:01 PM	Helium MFC set to  0.000000
2/14/2010	12:47:02 PM	H2 MFC set to  0.000000
2/14/2010	12:47:02 PM	BCl3 MFC set to  0.000000
2/14/2010	12:47:02 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:47:02 PM	Bypass solenoid MFC set to  760.000000
2/14/2010	12:47:02 PM	Tube furnace set to 0
2/14/2010	12:47:02 PM	Bypass solenoid MFC set to  760.000000
2/14/2010	12:47:10 PM	Program started after a nonstandard shutdown
2/14/2010	12:47:10 PM	Helium valve closed
2/14/2010	12:47:10 PM	H2 valve closed
2/14/2010	12:47:10 PM	BCl3 valve closed
2/14/2010	12:47:10 PM	PH3 valve closed
2/14/2010	12:47:10 PM	SiCl4 pre valve closed
2/14/2010	12:47:10 PM	SiCl4 post valve closed
2/14/2010	12:47:10 PM	Main Vac valve closed
2/14/2010	12:47:10 PM	Bypass valve closed
2/14/2010	12:47:10 PM	Bubbler valve closed
2/14/2010	12:47:10 PM	Helium MFC set to  0.000000
2/14/2010	12:47:10 PM	H2 MFC set to  0.000000
2/14/2010	12:47:10 PM	BCl3 MFC set to  0.000000
2/14/2010	12:47:10 PM	SiCl4 MFC set to  0.000000
2/14/2010	12:47:10 PM	Bypass solenoid MFC set to  760.000000
2/14/2010	12:47:10 PM	Tube furnace set to 0
2/14/2010	12:47:10 PM	Bypass solenoid MFC set to  760.000000
2/14/2010	12:47:17 PM	Bypass valve opened
2/14/2010	12:47:17 PM	Main Vac valve opened
